✦ LIBER ✦
Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale
✍ Scribed by Ho, Jian-Wei; Wee, Qixun; Dumond, Jarrett; Tay, Andrew; Chua, Soo-Jin
- Book ID
- 121593394
- Publisher
- Springer-Verlag
- Year
- 2013
- Tongue
- English
- Weight
- 818 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1931-7573
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