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Patterning amorphous fluoropolymer films by reactive ion milling

✍ Scribed by M. W. Denhoff; Mae Gao

Book ID: 107457617
Publisher: Springer US
Year: 1997
Tongue: English
Weight: 395 KB
Volume: 26
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-997-0278-2

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