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Passivation analysis of micromechanical silicon structures obtained by electrochemical etch stop

✍ Scribed by A. Götz; J. Esteve; J. Bausells; S. Marco; J. Samitier; J.R. Morante


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
903 KB
Volume
37-38
Category
Article
ISSN
0924-4247

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