✦ LIBER ✦
Quantifying the effects of uneven etching during the SIMS analysis of periodic doping structures grown by silicon MBE
✍ Scribed by D. S. McPhail; M. G. Dowsett; H. Fox; R. Houghton; W. Y. Leong; E. H. C. Parker; G. K. Patel
- Publisher
- John Wiley and Sons
- Year
- 1988
- Tongue
- English
- Weight
- 794 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0142-2421
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