Global simulation of a silicon Czochrals
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You-Rong Li; Deng-Fang Ruan; Nobuyuki Imaishi; Shuang-Ying Wu; Lan Peng; Dan-Lin
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Article
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2003
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Elsevier Science
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English
⚖ 507 KB
Control of melt flow in crystal growth process by application of the magnetic field is a practical technique for silicon single crystals. In order to understand the influence of axial magnetic field on the silicon melt flow and oxygen transport in a silicon Czochralski (Cz) furnace, a set of global