Particle swarm optimization for ellipsometric data inversion of samples having an arbitrary number of layers

✍ Scribed by Ross, Tyler; Cormier, Gabriel

• Book ID: 115391747
• Publisher: Optical Society of America
• Year: 2010
• Tongue: English
• Weight: 458 KB
• Volume: 27
• Category: Article
• ISSN: 1084-7529
• DOI: 10.1364/JOSAA.27.000319