Particle characterization up to 120°C
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 173 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1369-7021
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✦ Synopsis
Six-axis nanopositioning
PI's P-587.6CD six-axis piezo nanopositioning and scanning system combines six degrees of freedom, digital control, active trajectory error compensation, millisecond responsiveness, and long travel (up to 800 µm and 10 000 µrad per axis). Frictionless actuators and a flexure guiding system allow subnanometer, submicroradian resolution. An integrated AutoCalibration function allows fast setup and interchangeability of controllers and nanomechanisms. Integrated direct metrology capacitive displacement sensors provide high bandwidth, linearity, and stability. Parallel metrology means that all sensors measure the position of the same moving platform against the same stationary reference, so all motion is inside the servo-loop, regardless of which actuator caused it.
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