Particle characterization up to 120°C
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Article
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2005
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Elsevier Science
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English
⚖ 173 KB
## Six-axis nanopositioning PI's P-587.6CD six-axis piezo nanopositioning and scanning system combines six degrees of freedom, digital control, active trajectory error compensation, millisecond responsiveness, and long travel (up to 800 µm and 10 000 µrad per axis). Frictionless actuators and a fl