✦ LIBER ✦

Partially coherent imaging of alignment marks in photolithography

✍ Scribed by R. Hild; G. Nitzsche

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Linear restoration of partially coherent

✍ Bahaa E.A. Saleh 📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 115 KB

Compensation for aberrations in partiall

✍ W. Mirandé; I. Weingartner; E. Menzel 📂 Article 📅 1970 🏛 Elsevier Science 🌐 English ⚖ 585 KB

Analysis of partial coherence in grating

✍ Zhili Wang; Xiaosong Liu; Peiping Zhu; Wanxia Huang; Qingxi Yuan; Enrong Li; Yij 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 369 KB

Images of wedge-shaped objects under ill

✍ N. Nakajima; T. Asakura 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 453 KB

Effects of sound-light interaction on pa

✍ Yoshihiro Ohtsuka 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 296 KB

Superresolution lithography from the vie

✍ R. Hild; G. Nitzsche; U. Altenburger 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 764 KB