Partially and fully cured thin film photoresist waveguides for integrated optics

✍ Scribed by Gowri Arun; V.K Sharma; A Kapoor; K.N Tripathi

• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 101 KB
• Volume: 34
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(02)00035-x

✦ Synopsis

A systematic and detailed study of waveguide fabrication and characterization of a commercially available (from Shipley) photoresist is reported. Various waveguide properties such as refractive index, optical losses, waveguide thickness, dispersion and birefringence are reported. E ect of temperature of guide formation, curing (partial and full) and UV exposure on these parameters is also presented.