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Partial X-ray photoelectron spectroscopy to constructing neural network model of plasma etching surface

✍ Scribed by Byungwhan Kim; Woo Suk Kim

Book ID: 104051593
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 243 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.11.010

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