𝔖 Bobbio Scriptorium
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PANDA—A novel instrument for non-destructive sample analysis

✍ Scribed by Jani Turunen; Kari Peräjärvi; Roy Pöllänen; Harri Toivonen

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
673 KB
Volume
613
Category
Article
ISSN
0168-9002

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New spectroscopic ellipsometry techniques are very promising for the non-destructive surface analysis of thin films on metals. Infrared spectroscopic ellipsometry allows the morphological and chemical characterization of these films, and recent results are presented here.