Induction of p-type conduction in sputte
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Amit Kumar; Manoj Kumar; Beer Pal Singh
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Article
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2010
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Elsevier Science
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English
β 494 KB
Al and N codoped ZnO thin films were grown on n-Si (100) substrate by sputtering technique. Hall effect measurements of as-grown films exhibited n-type conduction, however 500 Β°C Ar annealed codoped films showed p-type conductivity with a hole concentration of 9.9 Γ 10 16 cm -3 , resistivity of 15.9