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Oxygen sticking coefficient and sputtering yields at an Al(1 1 1) surface by ion bombardment

✍ Scribed by Chin Shuang Lee; Tzu Ming Lin

Book ID: 117215298
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 255 KB
Volume: 471
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(00)00913-4

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Oxygen sticking coefficient and sputtering yields at an Al(1&#xa0;1&#xa0;1) surface by ion bombardment

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