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Oxygen sinks in reactions of thin bilayer refractory metal films with SiO2 substrates

✍ Scribed by S.Q. Wang; J.W. Mayer

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 964 KB
Volume: 202
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90547-b

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