Oxygen precipitates in annealed CZ silicon wafers detected by SIRM and FTIR spectroscopy

✍ Scribed by Caroline Veve; Michael Stemmer; Santo Martinuzzi

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 333 KB
• Volume: 36
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(95)01303-2