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Oxygen interaction with defects at the Si/SiO2 interface

✍ Scribed by J.H. Stathis; S. Rigo; I. Trimaille

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 194 KB
Volume: 79
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(91)90073-5

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