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Oxygen incorporation in thin films of In[sub 2]O[sub 3]:Sn prepared by radio frequency sputtering

✍ Scribed by Mergel, D.; Stass, W.; Ehl, G.; Barthel, D.

Book ID: 120434171
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 318 KB
Volume: 88
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1287603

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