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Oxygen flooding and sample cooling during depth profiling of HfSiON thin films

✍ Scribed by Shiro Miwa

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 558 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.05.043

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