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Oxygen depletion in electron beam bombarded glass surfaces studied by XPS

✍ Scribed by Orazio Puglisi; Giovanni Marletta; Alberto Torrisi

Book ID
118331980
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
481 KB
Volume
55
Category
Article
ISSN
0022-3093

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The oxidation of molybdenum at room temperature with oxygen plasma or a beam of ions has been studied O 2 ' with Auger electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS). Auger electron spectroscopy shows a progressive modiÐcation of the lineshape and the development of new featu