Oxygen behavior during titanium silicide formation by rapid thermal annealing: R Pantel et al, J appl Phys, 62, 1987, 4319–4321

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 156 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90496-x