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Oxide and interface trap densities estimation in ultrathin W/La2O3/Si MOS capacitors

✍ Scribed by M. Mamatrishat; T. Kubota; T. Seki; K. Kakushima; P. Ahmet; K. Tsutsui; Y. Kataoka; A. Nishiyama; N. Sugii; K. Natori; T. Hattori; H. Iwai

Book ID: 113800650
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 392 KB
Volume: 52
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2011.12.025

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