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Oxidation of tungsten surface with reactive oxygen plasma

✍ Scribed by Andriy Romanyuk; Viktor Melnik; Peter Oelhafen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface reactivity of tungsten

✍ Gasser, R. P. H.; Jackson, G. V. 📂 Article 📅 1975 🏛 Nature Publishing Group 🌐 English ⚖ 451 KB

Oxidation of tungsten disilicide in oxyg

✍ G. V. Samsonov; V. A. Lavrenko; L. A. Glebov 📂 Article 📅 1974 🏛 Springer 🌐 English ⚖ 443 KB

Interaction of Oxygen with Polycrystalli

✍ King, David A. 📂 Article 📅 1971 🏛 American Institute of Physics 🌐 English ⚖ 730 KB

Reactivity of oxygen on the surface of c

✍ V. S. Muzykantov; V. V. Popovskii; G. K. Boreskov; G. I. Panov; R. A. Shkrabina 📂 Article 📅 1969 🏛 Springer US 🌐 English ⚖ 631 KB

Reactive ion etching and plasma etching

✍ P. Verdonck; G. Brasseur; J. Swart 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 313 KB

Oxidation kinetics of a silicon surface

✍ A. Kh. Antonenko; V. A. Volodin; M. D. Efremov; P. S. Zazulya; G. N. Kamaev; D. 📂 Article 📅 2011 🏛 Allerton Press Inc 🌐 English ⚖ 218 KB