๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Oxidation of thin films of zirconium and Zr-Ti solid solutions on single-crystal silicon

โœ Scribed by A. M. Khoviv; I. E. Shramchenko

Book ID
110165871
Publisher
SP MAIK Nauka/Interperiodica
Year
2007
Tongue
English
Weight
171 KB
Volume
43
Category
Article
ISSN
0020-1685

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Growth and characterization of zirconium
Growth and characterization of zirconium oxide thin films on silicon substrate
โœ P.Y. Kuei; J.D. Chou; C.T. Huang; H.H. Ko; S.C. Su ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 843 KB

The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel