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Oxidation of silicon (oxy)nitride and nitridation of silicon dioxide: Manifestations of the same chemical reaction system?

✍ Scribed by F.H.P.M Habraken; A.E.T Kuiper

Book ID: 113204951
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 516 KB
Volume: 193-194
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90217-2

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