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Oxidation of silicon in the afterglow of microwave induced plasmas

✍ Scribed by C. Vinckier; P. Coeckelberghs; G. Stevens; S. De Jaegere

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 446 KB
Volume: 30
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(87)90071-7

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