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Oxidation of Porous Silicon in Dry and Wet Environments under Mild Temperature Conditions

✍ Scribed by Y.H. Ogata; T. Tsuboi; T. Sakka; S. Naito

Book ID: 110278882
Publisher: Springer
Year: 2000
Tongue: English
Weight: 39 KB
Volume: 7
Category: Article
ISSN: 1380-2224
DOI: 10.1023/a:1009694608199

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