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Oxidation of InxGa1−xAsyP1−y by NO2 studied with Auger electron spectroscopy

✍ Scribed by C.C. Bahr; E. Paparazzo; L. Moretto; F. Lama; N. Zema

Book ID
116066958
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
861 KB
Volume
316
Category
Article
ISSN
0039-6028

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## Abstract X‐ray photoelectron spectroscopy (XPS) and Bremsstrahlung‐excited Auger electron spectroscopy (XAES) were used to study the surface composition and oxidation of silicon carbide platelets which had been heated in air at 500–800° C. The surface oxide thickness for each heating time and te