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Electron-beam-induced decomposition and oxidation of thin CaF2-layers on Si(111) Studied by auger electron spectroscopy

✍ Scribed by Stefan Baunack; Alfred Zehe


Book ID
118363584
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
736 KB
Volume
225
Category
Article
ISSN
0039-6028

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