Oxidation of etched silicon in air at room temperature; Measurements with ultrasoft X-ray photoelectron spectroscopy (ESCA) and neutron activation analysis

✍ Scribed by G. Mende; J. Finster; D. Flamm; D. Schulze

• Book ID: 119481625
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 267 KB
• Volume: 128
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(83)80024-7