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Oxidation of CVD Si3N4 at 1550° to 1650°C

✍ Scribed by TOSHIO HIRAI; KOICHI NIIHARA; TAKASHI GOTO

Book ID: 110814850
Publisher: John Wiley and Sons
Year: 1980
Tongue: English
Weight: 1015 KB
Volume: 63
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.1980.tb10204.x

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