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Oxidation behaviour of silicon nitride under cyclic and static conditions

โœ Scribed by Minoru Maeda; Kazuo Nakamura; Tsutomu Ohkubo; Masaru Ito; Eiichi Ishii


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
991 KB
Volume
15
Category
Article
ISSN
0272-8842

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