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Orientation Dependence of Shear Mode Piezoelectric Properties of Epitaxial Pb(Zrx,Ti1-x)O3 Thin Films

✍ Scribed by Akama, Kenji; Kanno, Isaku; Yokokawa, Ryuji; Wasa, Kiyotaka; Kotera, Hidetoshi


Book ID
115536709
Publisher
Institute of Pure and Applied Physics
Year
2010
Tongue
English
Weight
613 KB
Volume
49
Category
Article
ISSN
0021-4922

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Orientation dependence of ferroelectric
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## Ε½ . Ε½ . Ε½ . We have grown thin Pb Zr Ti O PZT films on PtrSiO rSi substrates by pulsed laser ablation PLA and x 1yx 3 2 Ε½ . subsequent rapid thermal annealing RTA . X-ray diffraction analysis showed that the crystallographic orientation of PZT Ε½ . films after RTA clearly depended on the micros