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Organic–Inorganic Nanocomposites: Unique Resists for Nanolithography

✍ Scribed by K. E. Gonsalves; L. Merhari; H. Wu; Y. Hu

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 467 KB
Volume: 13
Category: Article
ISSN: 0935-9648
DOI: 10.1002/1521-4095(200105)13:10<703::aid-adma703>3.0.co;2-a

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