𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Organic diamond disk versus brazed diamond disk for dressing a chemical–mechanical polishing pad

✍ Scribed by Tsai, M.Y.; Li, P.H.; Sung, J.C.

Book ID
123494487
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
596 KB
Volume
23
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE 2001 IEEE International Symposium
[IEEE 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. - San Jose, CA, USA (8-10 Oct. 2001)] 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) - A novel pad conditioning disk design of tungsten chemical mechanical polishing process for deep sub-micron device yield improvement
✍ Wang, T.C.; Hsieh, T.E.; Wang, Y.L.; Liu, C.W.; Lo, K.Y.; Wang, J.K.; Lee, W. 📂 Article 📅 2001 🏛 IEEE ⚖ 381 KB