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Optogalvanic spectroscopy of sputtered atoms

✍ Scribed by G. N. Rao

Book ID
112742441
Publisher
Springer
Year
1988
Tongue
English
Weight
19 KB
Volume
39
Category
Article
ISSN
0304-3843

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The atomisation and optogalvanic (OG) properties of Ar-Mg a hollow cathode discharge (HCD) plasma are analysed. Under operating conditions of an Ar gas pressure of 39.8 Pa and a discharge current of 10 mA the real sputtering coefficient and the density of the magnesium atoms are calculated to be S k