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Optogalvanic effect in radio frequency discharges

✍ Scribed by N.V. Denisova; N.G. Preobraz; Joseph A. Caruso

Book ID
113375006
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
511 KB
Volume
49
Category
Article
ISSN
0584-8547

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Polymerizations in radio frequency glow discharges have been studied with a view to increasing polymer deposition rates and to investigate the reaction mechanism. The data are consistent with a scheme in which electrons or ions from the discharge polymerize a limited number of adsorbed monomer molec

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The effects of varying the monomer flow pattern, the ~ometry and dimensions of e!ectrode structures and other discharge parameters on the deposition rate of polymer films on electrode surfaces in r.f. discharges in monomer vapours are described. The results are consistent with the view that polymeri