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Optodynamics of laser ablation of graduation lines in chromium thin film on glass

✍ Scribed by Samo Kopač; Janez Pirš; Janez Možina

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
361 KB
Volume
96-98
Category
Article
ISSN
0169-4332

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Laser ablation was used to realise piezoelectric films for use in a low-voltage cantilever bimorph actuator structure. Neodymiumdoped lead zirconium titanate (PZT) targets were ablated by a pulsed \(\mathrm{XeCl}\) excimer laser (wavelength \(308 \mathrm{~nm}\) ). The deposited films showed a better