Optimum optics for die-to-wafer-like image mask inspection

✍ Scribed by Akira Takada; Toru Tojo; Masato Shibuya

• Publisher: Optical Society of Japan
• Year: 2009
• Tongue: English
• Weight: 300 KB
• Volume: 16
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/s10043-009-0012-9