A New Algorithm for Die-to-Wafer-like Image Mask Inspection in Real Time

✍ Scribed by Akira Takada; Toru Tojo; Masato Shibuya

• Publisher: Optical Society of Japan
• Year: 2007
• Tongue: English
• Weight: 711 KB
• Volume: 14
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/s10043-007-0384-7