Optimizing high efficient plasma immersion ion implantation hydrogenation for poly-Si thin film transistors

✍ Scribed by Shu Qin; Yuanzhong Zhou; Tomoya Nakatsugawa; Chung Chan

• Book ID: 114169106
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 686 KB
• Volume: 124
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00078-5