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Optimized implant dose and energy to fabricate high-quality patterned SIMOX SOI materials

✍ Scribed by Yemin Dong; Jing Chen; Xiang Wang; Meng Chen; Xi Wang

Book ID: 108269226
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 803 KB
Volume: 130
Category: Article
ISSN: 0038-1098
DOI: 10.1016/j.ssc.2004.01.027

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📜 SIMILAR VOLUMES

[IEEE 2004 IEEE International SOI Confer

[IEEE 2004 IEEE International SOI Conference - Charleston, SC, USA (4-7 Oct. 2004)] 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) - Fabrication of high quality patterned SOI materials by optimized low-dose SIMOX

✍ Yemin Dong, ; Meng Chen, ; Jing Chen, ; Xi Wang, 📂 Article 📅 2004 🏛 IEEE ⚖ 164 KB