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Optimization techniques for the estimation of the thickness and the optical parameters of thin films using reflectance data

✍ Scribed by Ventura, S. D.; Birgin, E. G.; Martínez, J. M.; Chambouleyron, I.


Book ID
120216075
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
490 KB
Volume
97
Category
Article
ISSN
0021-8979

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The problem of estimating the thickness and the optical constants of thin films using transmission data only is very challenging from the mathematical point of view and has a technological and an economic importance. In many cases it represents a very ill-conditioned inverse problem with many local-