✦ LIBER ✦

Ellipsometric Technique for Estimating the Thickness Nonuniformity of Thin-Film Coatings

✍ Scribed by Baturin, A. S.; Bormashov, V. S.; Gavrilenko, V. P.; Zablotskii, A. B.; Zaitsev, S. A.; Kuzin, A. Yu.; Todua, P. A.; Filippov, M. N.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Estimation of film thickness nonuniformi

✍ Gordon P. Bierwagen 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 788 KB

Techniques for ellipsometric measurement

✍ William A. McGahan; Blaine Johs; John A. Woollam 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 307 KB

Technique for Estimating Thickness of a

✍ PATRICK S. NICHOLSON 📂 Article 📅 1969 🏛 John Wiley and Sons 🌐 English ⚖ 346 KB

Discussion of “Technique for Estimating

✍ ERNEST G. EHLERS 📂 Article 📅 1969 🏛 John Wiley and Sons 🌐 English ⚖ 121 KB

Method of estimating the mechanical stre

✍ Gainutdinov, I. S.; Nesmelov, E. A.; Aliakberov, R. D.; Mikhailov, A. V. 📂 Article 📅 2004 🏛 Optical Society of America 🌐 English ⚖ 44 KB

EUV reflectometry for thickness and dens

✍ Döring, S.; Hertlein, F.; Bayer, A.; Mann, K. 📂 Article 📅 2012 🏛 Springer 🌐 English ⚖ 906 KB