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Optimization of the spreading resistance profiling technique for submicron structures

✍ Scribed by H.L. Berkowitz; D.M. Burnell; R.J. Hillard; R.G. Mazur; P. Rai-Choudhury

Book ID
103393541
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
560 KB
Volume
33
Category
Article
ISSN
0038-1101

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## Abstract Within this work, we have explored the use of scanning spreading resistance microscopy (SSRM) on advanced solar cell structures. Three main topics, corresponding to three important needs, were targeted. First, we have analyzed the highly doped regions at the frontside of solar cells. Th