High-temperature spreading-resistance profiling for the characterization of impurity distributions in n-type silicon

✍ Scribed by S. Voss; H. Bracht; N.A. Stolwijk

• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 107 KB
• Volume: 4
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(00)00155-4