✦ LIBER ✦

Optimization of the deposition process of ZrN and TiN thin films on Si(1 0 0) using design of experiment method

✍ Scribed by Wen-Jun Chou; Chun-Hsing Sun; Ge-Ping Yu; Jia-Hong Huang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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Microstructure and electrical properties

✍ Ru-Yuan Yang; Yan-Kuin Su; Min-Hang Weng; Yung-Shou Ho 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 463 KB

Effect of nitrogen flow rate on the stru

✍ Jia-Hong Huang; Chi-Hsin Ho; Ge-Ping Yu 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 486 KB

Preparation of c-axis textured SrTiO3 th

✍ Wen-Ching Shih; Wei-Hong Yang 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 349 KB

Growth of 3C–SiC(1 0 0) thin f

✍ Takashi Matsumoto; Masato Kiuchi; Satoshi Sugimoto; Seiichi Goto 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 685 KB

Composition and morphological characteri

✍ L. Castañeda; A. Maldonado; J.C. Cheang-Wong; M. Terrones; M. de la L. Olvera 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 315 KB