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Optimization of Spin-Valve Structure NiFe/Cu/NiFe/IrMn for Planar Hall Effect Based Biochips

✍ Scribed by Bui Dinh Tu; Le Viet Cuong; Tran Quang Hung; Do Thi Huong Giang; Tran Mau Danh; Nguyen Huu Duc; CheolGi Kim

Book ID
114653010
Publisher
IEEE
Year
2009
Tongue
English
Weight
764 KB
Volume
45
Category
Article
ISSN
0018-9464

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## Abstract Conventional NiFe/Cu/NiFe/IrMn multilayer spin‐valve structure is used for patterning planar Hall effect (PHE) sensor fabrication. The three different junctions, 50Γ—50 ΞΌm^2^, 20Γ—20 ΞΌm^2^ and 5Γ—5 ΞΌm^2^, were prepared by lithography technique for obtaining the PHE profiles. The PHE measur