Optimization of silica deposition by sputtering in the silicon thin film transistors realization in low temperature technology

✍ Scribed by K. Kis Sion; J. Pinel; V. Dollé; L. Pichon; O. Bonnaud

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 304 KB
• Volume: 28
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(95)00097-r