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Optimization of rapid thermal processing for uniform temperature distribution on wafer surface

✍ Scribed by Hyuck-Keun Oh; Sae Byul Kang; Young Ki Choi; Joon Sik Lee

Book ID: 107624575
Publisher: Springer-Verlag
Year: 2009
Tongue: English
Weight: 537 KB
Volume: 23
Category: Article
ISSN: 1738-494X
DOI: 10.1007/s12206-009-0108-y

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